Optical-capacitance-transinet spectroscopy measurement system (It also works as DLTS system) |
DLTS measurement system (Capacitance, current and fast-pulse measurement) |
Microwave photocunductivity decay and Time-resolved photoluminescence |
Furnace (bigger) (Maximum temperature 1100oC) |
High temperature oven |
Infrared furnace (Maximum temperature 1600oC) |
High voltage prober |
Carrier lifetime mapping system using free carrier absorption |